TEAl SSG
Product Line High purity metalorganics
TEAl SSG is an aluminum precursor for atomic layer deposition (ALD) processes.
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ProductChemicalFamily
High Purity Metalorganics -
ProductCASnr
97-93-8 -
ProductPhysicalForm
Liquid -
ProductRegionalAvailability
Africa, Asia, Asia Pacific, China, Europe, Global, India, Latin America, Middle East, North America, Oceania -
ProductMolecularWeight
114.2 -
ProductChemicalsName
Triethylaluminum
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Molecular drawing
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ProductApplications
TEAl SSG is used as a high quality aluminum precursor for atomic layer deposition (ALD) processes in the silicon semiconductor industry. Containers are fabricated from stainless steel with an electropolished internal finish and are equipped with dip tube for top discharge and diaphragm valves. The diaphragm valves are equipped with metal gasket face seal connections.
Downloads
Other Documents
Brochure High Purity Metalorganics (HPMO)
- Brochure | application/pdf (175,7 KB) | English
Use Cases
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