TEGa SSG
Product Line High purity metalorganics
TEGa SSG is a gallium precursor for the deposition of compound semiconductors.
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ProductChemicalFamily
High Purity Metalorganics -
ProductCASnr
1115-99-7 -
ProductPhysicalForm
Liquid -
ProductMolecularWeight
156.9 -
ProductChemicalsName
Triethylgallium
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Molecular drawing
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ProductApplications
TEGa SSG is used as a gallium precursor for the deposition of compound semiconductors which are used in applications such laser diodes, sensors (VCSEL), light emitting diodes (LED) and concentrated photovoltaic cells (CPV). TEGa is mainly used in processes with lower deposition temperatures. The triethylgallium is supplied in cylinders made from stainless steel with an electropolished internal finish. The cylinders are equipped with dip tube and diaphragm valves. The diaphragm valves are equipped with metal gasket VCR-connections.
Downloads
Product Data Sheets
PDS TEGa SSG - Electronics (English)
- Product Data Sheet | application/pdf (45,4 KB) | English
Other Documents
Brochure High Purity Metalorganics (HPMO)
- Brochure | application/pdf (175,7 KB) | English
Use Cases
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